Please update your browser.

It looks like you are using an old version of the Microsoft Edge browser. To get the best experience with the Busch website, please update your browser.

  • TORRI BD 0100–0600 A, Rotary lobe, Busch Vacuum Solutions

TORRI BD 0100–0600 A

Rotary lobe

The Compact and Energy-Efficient Solution for Load Lock Chambers

Flexible

Shortest pump-down time for load lock chambers

Efficient

Extremely low energy consumption, minimal maintenance, high uptime

Compact

Exceptionally small and light-weight

Technical specifications
Markets & applications
Semiconductor production
  • Light