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  • Busch Vacuum Soloutions, GABA Gas Abatement Systems

GABA AWE 050 AE

Gas Abatement System

Wet scrubber gas abatement for EPI processes

Reliable

Specially designed for demanding EPI processes, powerful venturi unit, patented gas inlet clogging preventer, no trapping of by-products before abatement necessary (honey trap)

Minimal maintenance

Extended service intervals, high uptime, easy servicing, fast service routine, no dismantling necessary

Efficient

Proven wet scrubber technology, low operating costs, built-in water recirculation system, easy operation through PLC with color touch screen

Technical specifications