- Advanced Screw Design
low operating costs, minimal maintenance, high uptime
Short Process Times:
due to high pumping speeds
COBRA DS 8162/8163 A/E are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat panels and semiconductors. State-of- the-art COBRA DS screw vacuum technology allows powder- and particle-laden media to be evacuated.
COBRA DS screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion. The COBRA DS 8162/8163 A/E feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The backing pump and vacuum booster are combined on a compact base frame.
Equipped with high-efficiency motors, the COBRA DS 8162/8163 A/E offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.
Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.
- High-capacity load lock
- Coater process (PGMEA solvent process)