- Advanced Screw Design:
bell shaped construction, patented self-balancing screws
best-in-class energy footprint, low cost of ownership, minimal maintenance, high uptime
sound level < 58 dB(A)
- Compact Design
The COBRA BC 0600 F Premium Efficiency is a dry screw vacuum pump in the proven COBRA BC series. State-of-the-art screw vacuum pump technology featuring a specially developed screw profile sets new standards of efficiency, making these vacuum pumps the ideal solution for tasks in load lock and transfer chambers, as well as in processes such as metrology, lithography, physical vapor deposition (PVD) and rapid thermal annealing (RTA).
The COBRA BC Premium Efficiency series equipped with the latest Busch VacBoost technology meets today’s demand for maximum energy savings and environmental sustainability through 40% lower energy consumption compared to standard vacuum generators. An intelligent stand-by mode, along with a wide range of flexible idle modes, offers additional energy savings potential. High reliability and minimal maintenance further reduce total cost of ownership.
Due to the sophisticated bell shaped cantilever construction, the twin rotor with variable pitch screws is mounted only on the motor side, while the unique “flying bearing” design makes inlet bearings unnecessary. As a result, the pumped medium does not come in contact with the bearings. This ensures clean vacuum generation and allows the full recovery of pumped gases. The direct gas path between inlet and outlet prevents dead spaces and ensures there are no process deposits inside the compression chamber.
The patented self-balancing screw design and screw rotor mounted precisely at the center of gravity ensure excellent running qualities and provide high uptime. A directly mounted canned motor makes the dimensions of the COBRA BC series very compact.
The fully open communication protocol (Modbus TCP-IP) allows control of all functionalities, including idle modes and variable speed drive. It can easily be adapted to a specific network protocol using standard interface components.