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  • Busch Vacuum Solutions, Dry screw vacuum pump , COBRA DS 5161-9161 B,F

COBRA DS 5161–9161 B/F

Dry screw vacuum pumps

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition


Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput


Fit-in-place design, directly mounted canned motor

Technical specifications

Markets & applications

Biogas handling
  • Upgrading - pressure swing adsorption
Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Load lock chambers
  • Organic light-emitting diode (OLED)
  • Physical vapor deposition (PVD)
Lithium ion battery production
  • Degassing
Semiconductor production
  • Medium
  • Harsh
  • Light
Solar power industry
  • Plasma-enhanced chemical vapor deposition (PECVD)