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  • COBRA DS 0600 E , Screw Vacuum Pump , Busch Vacuum Solutions


Dry screw vacuum pump

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition


Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput


Fit-in-place design, directly mounted canned motor

Technical specifications

Markets & applications

Biogas handling
  • Upgrading - pressure swing adsorption
Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Load lock chambers
  • Organic light-emitting diode (OLED)
  • Physical vapor deposition (PVD)
Lithium ion battery production
  • Degassing
Semiconductor production
  • Medium
  • Harsh
  • Light
Solar power industry
  • Ingot casting
  • Plasma-enhanced chemical vapor deposition (PECVD)


  • Tantal coating for harsh applications