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  • COBRA BC 0601–1200 A/G, Screw, Busch Vacuum Solutions

COBRA BC 0601–1200 A/G

Dry screw vacuum pumps

The Ideal Solution for Light to Medium Semiconductor Applications

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology, lithography, physical vapor deposition, rapid thermal annealing and etching processes like oxide, silicon and metal


Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling


Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical specifications

Markets & applications

Biogas handling
  • Upgrading - pressure swing adsorption
Semiconductor production
  • Medium
Solar power industry
  • Physical vapor deposition (PVD)