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  • COBRA BC 0101 G , Screw Vacuum Pump , Busch Vacuum Solutions


Dry screw vacuum pump

The Ideal Solution for Light to Medium Semiconductor Applications

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing


Intelligent variable speed drive, low cost of ownership, minimal maintenance, high uptime, direct water cooling


Fit-in-place design, directly mounted canned motor, integrated control panel

Technical specifications

Markets & applications

Biogas handling
  • Upgrading - pressure swing adsorption
Semiconductor production
  • Light