Please update your browser.

It looks like you are using an old version of the Microsoft Edge browser. To get the best experience with the Busch website, please update your browser.

  • COBRA BC 0100/0200 F, Screw Vacuum Pump, Busch Vacuum Solutions

COBRA BC 0100/0200 F

Dry screw vacuum pumps

The Ideal Solution for Light to Medium Semiconductor Applications

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing


Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling, idle mode capabilities


Fit-in-place design, directly mounted canned motor

Technical specifications

Markets & applications

Semiconductor production
  • Medium