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  • COBRA BC 0100/0200 F PREMIUM EFFICIENCY, Screw Vacuum Pump, Busch Vacuum Solutions

COBRA BC 0100/0200 F Premium Efficiency

Dry screw vacuum pumps

The Ideal Solution for Light to Medium Semiconductor Applications

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers


Latest Busch VacBoost technology, low cost of ownership, minimal maintenance, high uptime, direct water cooling, intelligent idle mode


Fit-in-place design, directly mounted canned motor

Technical specifications

Markets & applications

Semiconductor production
  • Light