COBRA BC 0100/0200 F Premium Efficiency
Dry screw vacuum pumps
The Ideal Solution for Light to Medium Semiconductor Applications
High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers
Efficient
Latest Busch VacBoost technology, low cost of ownership, minimal maintenance, high uptime, direct water cooling, intelligent idle mode
Compact
Fit-in-place design, directly mounted canned motor
Technical specifications
Markets & applications
Semiconductor production
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