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  • COBRA DS 0080/0160 G , Screw Vacuum Pump , Busch Vacuum Solutions

COBRA DS 0080/0160 G

Screw

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput

Compact

Fit-in-place design, directly mounted canned motor

Technical specifications
Markets & applications
Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Organic light-emitting diode (OLED)
  • Load lock chambers
  • Physical vapor deposition (PVD)
Semiconductor production
  • Harsh
Solar power industry
  • Plasma-enhanced chemical vapor deposition (PECVD)