PANDA/PUMA

PANDA WZ significantly increase the performance of all types of backing pumps in the medium and high vacuum range. They have been specially designed for semiconductor processes.

Thanks to a directly flange-mounted water-cooled motor, PANDA WZ vacuum boosters are leak-tight to the atmosphere. They are perfectly suited to handle aggressive or toxic gases.

Having no coupling between motor and housing, PANDA WZ are compact. They can be flanged directly onto the backing pump or at any other position in the system.


PANDA WZ vacuum boosters operate completely contact-free and without any operating fluids in the process chamber. Maintenance is therefore limited to a minimum. Additionally, PANDA WZ vacuum boosters have an exceptional volumetric efficiency and low energy consumption. All this leads to low operating costs.

PANDA vacuum boosters are equipped with a bypass valve as standard. It reliably protects the vacuum boosters against overloading or overheating and allows them to be used for high differential pressures. Additionally, PANDA WZ are compatible with a variable speed drive.

PANDA WV significantly increase the performance of all types of backing pumps in the rough, medium and high vacuum range.

They are equipped with a bypass valve as standard. It reliably protects the vacuum boosters against overloading or overheating and allows them to be used for high differential pressures.

PANDA WV vacuum boosters operate completely contact-free and without any operating fluids in the process chamber. Maintenance is therefore limited to a minimum. Additionally, PANDA WV vacuum boosters have an exceptional volumetric efficiency and low energy consumption. All this leads to low operating costs.

PANDA WV can be flanged directly onto the backing pump or at any other position in the system. They are also compatible with a variable speed drive.

PUMA WY significantly increase the performance of all types of backing pumps in the medium and high vacuum range. They have been specially designed for semiconductor processes.

Thanks to a directly flange-mounted water-cooled motor, PUMA WY vacuum boosters are leak-tight to the atmosphere. They are perfectly suited to handle aggressive or toxic gases.

PUMA WY vacuum boosters operate completely contact-free and without any operating fluids in the process chamber. Maintenance is therefore limited to a minimum. Additionally, PUMA WY vacuum boosters have an exceptional volumetric efficiency and low energy consumption. All this leads to low operating costs.

PUMA WY can be controlled using a pressure switch. The pressure switch activates the vacuum booster when it has achieved the optimum working pressure. Alternatively, PUMA WY are available in versions with variable speed drive.

Having no coupling between motor and housing, PUMA WY are compact. They can be flanged directly onto the backing pump or at any other position in the system.

PUMA WP significantly increase the performance of all types of backing pumps in the rough and medium vacuum range.

PUMA WP can be controlled using a pressure switch. The pressure switch activates the vacuum booster when it has achieved the optimum working pressure. Alternatively, PUMA WP are available in versions with variable speed drive.

PUMA WP vacuum boosters operate completely contact-free and without any operating fluids in the process chamber. Maintenance is therefore limited to a minimum. Additionally, PUMA WP vacuum boosters have an exceptional volumetric efficiency and low energy consumption. All this leads to low operating costs.

PUMA WP can be flanged directly onto the backing pump or at any other position in the system.

PUMA WG vacuum boosters offer high performance in the rough vacuum range. This makes them ideal for applications involving high differential pressures and gas throughputs when compressing against atmosphere, such as steel degassing or vapor recovery. By connecting two PUMA WG boosters in series, the ultimate pressure can be further reduced to 20 to 30 hPa (mbar). In combination with additional vacuum boosters, even lower pressures in the medium vacuum range are achievable.

Thanks to internal gas circulation cooling, PUMA WG vacuum boosters can compress against atmospheric pressure without the danger of thermal overload. Instead of ambient air or water, gas-cooled vacuum boosters use part of the pumped medium for thermal management.

During operation, the pumped medium heats up as it is compressed and exits through the outlet. It then flows through a heat exchanger connected to the exhaust, where it is cooled by surrounding cooling water. Heat is transferred through the plate walls of the exchanger to the cooling water, reducing the gas temperature. A portion of this cooled gas is recirculated back into the compression chamber, where it mixes with the incoming process gas and cools the internal components. This controlled circulation ensures a balanced thermal distribution even when operating at ultimate pressure.

By using an optional variable speed drive (VSD) with PUMA WG boosters, their rotational speed can be adjusted to match the required vacuum level, reducing energy consumption and improving efficiency.