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COBRA DS 0080 / 0160 G

  • Advanced Screw Design
  • Efficient:
    cost-effective, minimal maintenance, high uptime
  • Flexible:
    application-oriented
  • Short Process Times:
    due to high pumping speeds
  • Robust:
    anti-corrosion coating on internal components
  • Compact Design


COBRA DS 0080/0160 G are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat screens and semiconductors. State-of-the-art COBRA DS screw vacuum pump technology allows powder- and particle-laden media to be evacuated.

COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.

Equipped with high-efficiency motors, the COBRA DS 0080/0160 G offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.

Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.

Applications

  • High-density plasma CVD (HDP-CVD)
  • Rapid thermal processing (RTP)
  • Sub-atmospheric CVD (SACVD)
  • Metal-organic CVD (MOCVD)
  • Plasma-enhanced CVD (PECVD)
  • Low-pressure CVD (LPCVD)
  • Atomic layer deposition (ALD)

COBRA – the new generation of dry vacuum pumps for demanding processes.

COBRA – the new generation of dry vacuum pumps for demanding processes.

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Données techniques

Technical specifications
Two screw rotors inside the cylinder of the COBRA DS rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen.

Schéma COBRA DS 0080/0160 G
COBRA DS 0080/0160 G
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Spécifications techniques COBRA DS 0080 G COBRA DS 0160 G
Vitesse de pompage nominale 70 m³/h 140 m³/h
Pression finale 0,03 (3·10-2) hPa (mbar) 0,03 (3·10-2) hPa (mbar)
Puissance nominale du moteur 4,0 kW 5,5 kW
Vitesse nominale du moteur 3000 min-1 3000 min-1
Consommation électrique à pression finale 2,6 kW 4,3 kW
Niveau sonore (ISO 2151) <62 dB(A) <68 dB(A)
Consommation d'eau 4,0 l/min 4,0 l/min
Consommation d'azote 0 – 75 l/min 0-75 l/min
Poids approx. 276 kg 338 kg
Dimensions (L x W x H) 865 x 385 x 667 mm 975 x 425 x 697 mm
Aspiration/échappement de gaz DN 40 / DN 40 DN 50 / DN 40

Données techniques

Technical specifications
Two screw rotors inside the cylinder of the COBRA DS rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen.

Schéma
COBRA DS 0080/0160 G
COBRA DS 0080/0160 G
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz
60 Hz
Pumping speed
Spécifications techniques COBRA DS 0080 G COBRA DS 0160 G
Vitesse de pompage nominale 70 m³/h 140 m³/h
Pression finale 0,03 (3·10-2) hPa (mbar) 0,03 (3·10-2) hPa (mbar)
Puissance nominale du moteur 4,0 kW 5,5 kW
Vitesse nominale du moteur 3000 min-1 3000 min-1
Consommation électrique à pression finale 2,6 kW 4,3 kW
Niveau sonore (ISO 2151) <62 dB(A) <68 dB(A)
Consommation d'eau 4,0 l/min 4,0 l/min
Consommation d'azote 0 – 75 l/min 0-75 l/min
Poids approx. 276 kg 338 kg
Dimensions (L x W x H) 865 x 385 x 667 mm 975 x 425 x 697 mm
Aspiration/échappement de gaz DN 40 / DN 40 DN 50 / DN 40

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COBRA DS 0080 / 0160 G

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