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COBRA DS 0080 / 0160 G

  • Advanced Screw Design
  • Efficient:
    cost-effective, minimal maintenance, high uptime
  • Flexible:
    application-oriented
  • Short Process Times:
    due to high pumping speeds
  • Robust:
    anti-corrosion coating on internal components
  • Compact Design


COBRA DS 0080/0160 G are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat screens and semiconductors. State-of-the-art COBRA DS screw vacuum pump technology allows powder- and particle-laden media to be evacuated.

COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.

Equipped with high-efficiency motors, the COBRA DS 0080/0160 G offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.

Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.

Applications

  • High-density plasma CVD (HDP-CVD)
  • Rapid thermal processing (RTP)
  • Sub-atmospheric CVD (SACVD)
  • Metal-organic CVD (MOCVD)
  • Plasma-enhanced CVD (PECVD)
  • Low-pressure CVD (LPCVD)
  • Atomic layer deposition (ALD)

COBRA – the new generation of dry vacuum pumps for demanding processes.

Want to know more?
Contact us directly (Busch United States):
+1 757 463 7800 Get in contact

Technical specifications
Two screw rotors inside the cylinder of the COBRA DS rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen.


COBRA DS 0080/0160 G
COBRA DS 0080/0160 G
Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data COBRA DS 0080 G COBRA DS 0160 G
Nominal pumping speed m³/h 50 Hz 70 140
Ultimate pressure hPa (mbar) 50 Hz 0.03 (3·10-2) 0.03 (3·10-2)
Nominal motor rating kW 50 Hz 4.0 5.5
Nominal motor speed min-1 50 Hz 3000 3000
Power consumption at ultimate pressure kW 50 Hz 2.6 4.3
Noise level (ISO 2151) dB(A) 50 Hz <62 <68
Water consumption l / min 50 Hz 4.0 4.0
Nitrogen consumption l / min 50 Hz 0 – 75 0-75
Weight approx. kg 50 Hz 276 338
Dimensions (L x W x H) mm 50 Hz 865 x 385 x 667 975 x 425 x 697
Gas inlet / outlet 50 Hz DN 40 / DN 40 DN 50 / DN 40

Downloads

COBRA DS 0080 / 0160 G

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