Proven technology, proven design –
decide for the best solution


  • Advanced Screw Design:
    bell shaped construction, patented self-balancing screws
  • Efficient:
    air cooled, low cost of ownership, minimal maintenance, high uptime
  • Reliable:
    operationally reliable
  • Flexible:
  • Quiet:
    low noise and vibration level
  • Compact Design

The COBRA BA 0100 C is the proven dry screw vacuum pump for the evacuation of load-lock chambers and other demanding processes involved in the production of photovoltaic cells, flat panels and semiconductors. With its efficient air cooling and the highest pumping speed in its performance class, this vacuum pump is ideal for all applications requiring effective, fast and reliable vacuum generation. COBRA vacuum pumps are oil- and contact-free, allowing particleladen media to be evacuated.

Due to the sophisticated bell shaped cantilever construction, the twin rotor with variable pitch screws is mounted only on the motor side, while the unique “flying bearing” design makes inlet bearings unnecessary. As a result, the pumped medium does not come in contact with the bearings. This ensures clean vacuum generation and allows the full recovery of pumped gases. The direct gas path between inlet and outlet prevents dead spaces and ensures there are no process deposits inside the compression chamber.

The patented self-balancing screw design and screw rotor mounted precisely at the centre of gravity ensure excellent running qualities and guarantee high uptime. A directly mounted canned motor makes the dimensions of the COBRA BA series very compact and eliminates dynamic seals.


  • Load-lock for semiconductor applications
  • Analytical instruments
  • Thin film coating
  • R&D applications
  • Sterilization
  • Furnaces
  • Freeze-drying
  • Gas recovery

COBRA – the next level of high capacity harsh duty vacuum pumps.

Want to know more?
Contact us directly (Busch Germany):
+49 (0)7622 681-0 Get in contact

Technical specifications
Two screw rotors inside the cylinder of the COBRA BA 0100 C rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come in contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. The advanced screw design results in lower electrical energy consumption and a lower compressed gas heat load compared to standard screw designs. The COBRA BA 0100 C uses efficient air cooling. A seal and dilution gas system (option) is available for pumping vapours and condensable gases.

Pumping speed

Air at 20 °C. Tolerance: ± 10%

50 Hz 60 Hz
Pumping speed
Technical data COBRA BA 0100 C
Nominal pumping speed m³/h 50 Hz 85
Ultimate pressure hPa (mbar) 0.01
Nominal motor rating kW 50 Hz 1.5
Nominal motor speed min-1 50 Hz 3000
Power consumption at ultimate pressure kW 50 Hz 1.1
Noise level (ISO 2151) dB(A) 58
Nitrogen consumption l / min 50 Hz 0-50
Weight approx. kg 120
Dimensions (L x W x H) mm 634 x 304 x 338
Gas inlet / outlet DN 50 KF / DN 40 KF



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