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Full Sub-Fab Management Service

for Semiconductor Industries

Full Sub-Fab Management Service

for Semiconductor Industries

Are you looking for maximum availability of your Sub Fab systems with minimum downtime at attractive cost?

We have the answer! Busch offers full Sub Fab management service for all your vacuum related equipment and applications which guarantees availability of your systems thanks to a service schedule tailored to your needs.


Our service considers all systems, pumps and components as well as various process-specific requirements of individual applications (e.g. abatement systems, foreline / exhaust services, parts cleaning and hook-up support). We take into account the different life-cycles of wearing parts and carry out routine services as needed, all of which we plan into your production requirements to cause as little disruption to your production as possible.

Busch is semiconductor market leader in on-site vacuum and abatement services, with extensive sub fab management knowledge. Our service enables you to get access to our network of highly skilled service technicians' extensive experience gained through servicing thousands of vacuum pumps across all industry sectors.

With our current one hundred on-site service technicians we can tailor our service to your demand. We have 15 years of experience in servicing abatement systems from all leading OEM´s as well as vacuum fore, - exhaust lines and of course vacuum pumps.

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Semiconductor Service Locations

for Medium and High Vacuum Pumps

Semiconductor Services:

Remanufacture
of Medium and High Vacuum Pumps


Service Exchange
for Medium and High Vacuum Pumps


Full Sub-Fab Management Service
for Semiconductor Industries

The benefits at a glance

  • Extensive Sub Fab management, system and process consultancy knowledge is available for you through fully trained and experienced service engineers specialized in the field of Semiconductor Industries
  • Planned preventative maintenance of your vacuum pumps and systems
  • Reduced risk of unexpected breakdowns therefore reduced production downtime
  • Service support on all manufacturers medium and high vacuum pumps and systems
  • With a worldwide presence of semiconductor service facilities a nearby workshop is always available to support the Full Sub Fab service team
  • Remanufactured second hand pumps available for quick exchanges
  • High end quality standard for every vacuum pump leaving our workshops
  • Over 15 years of experience in servicing abatement systems

Vous souhaitez en savoir plus ?
Contactez-nous directement ( Busch France ):
+33 (0) 1 69 89 89 89 Contactez-nous
Vous souhaitez en savoir plus ?
Contactez-nous directement ( Busch France ):
+33 (0) 1 69 89 89 89 Contactez-nous

Environmental solutions
Together with our partner, a leading manufacturer of abatement systems for the semiconductor industries, we can offer and maintain a complete process solution, from the point of use vacuum pump until the main duct of the Fab. The large installed base of around 5000 abatement systems includes Thermal-Wet, Plasma-Wet, Wet Scrubbers as well Burn-Wet solutions.

Quality standards
Our service teams are certified to ISO 9001:2015, ISO 14001 and OSHAS 18001.

In addition to the mentioned ISO standards we are working according to ISO TS16949 standards in our remanufacturing facilities. Our unique ARPQP – Advance Remanufacture Product Quality Planning - methodology ensures a high end quality standard for every vacuum pump which leaves our workshops.

Service in detail
After the initial site survey, the Full Sub Fab Management servicing benefits will be explained and discussed with you, your Busch advisor will draw up a list of all of your medium and high vacuum pumps and system components along with their individual process requirements. From this information we generate a detailed quotation for you, which is based on the relevant service products and options you have chosen for your vacuum process.


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