Torri multi-stage rotary lobe vacuum pumps are the compact and energy-efficient solution for pump-down of load lock chambers.
They are characterized by low ultimate pressure and best-in class chamber pump-down time.
Principle of Operation
Torri BD vacuum pumps operate according to the proven rotary lobe principle.
The rotation of the lobes traps the pumped medium, transports it from stage to stage and finally to the outlet.
Due to the special profile of the lobes and their precise manufacturing, they do not come into contact with each other or the housing.
In addition, no lubricants or operating fluids are required in the compression chamber.
The lobes are driven by a directly coupled synchronous water-cooled electric motor.