The New Generation of Dry Vacuum Pumps for Demanding Processes
High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, excellent powder handling capabilities, perfectly suited for semiconductor applications, flat panel display production and solar power applications
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput, variable temperature control, low vibration level
Compact
Fit-in-place design, directly mounted canned motor, integrated control panel, backing pump and vacuum booster combined on a compact base frame
Technical specifications
Markets & applications
Flat panel display production
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Plasma-enhanced chemical vapor deposition (PECVD)
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Load lock chambers
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Organic light-emitting diode (OLED)
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Physical vapor deposition (PVD)
Semiconductor production
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Medium
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Harsh
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Light
Solar power industry
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Physical vapor deposition (PVD)
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Lamination
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Ingot casting
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Load lock chambers
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Plasma-enhanced chemical vapor deposition (PECVD)