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  • TORRI BD 0100–0600 A, Rotary lobe, Busch Vacuum Solutions

TORRI BD 0100–0600 A

Multi-stage rotary lobe vacuum pumps

The Compact and Energy-Efficient Solution for Load Lock Chambers


Shortest pump-down time for load lock chambers


Extremely low energy consumption, minimal maintenance, high uptime


Exceptionally small and light-weight

Technical specifications

Markets & applications

Semiconductor production
  • Light