- Highest pumping speed and gas flow rates
- Operationally reliable
- Long service life
- Nearly maintenance-free
RANGU
Diffusion vacuum pumps
RANGU are a series of diffusion vacuum pumps. They have been specially designed for industrial high vacuum applications. These include glass coating units, vacuum furnaces, metal coatings, physical vapor deposition (PVD), surface treatments or thin film coating.
RANGU diffusion vacuum pumps work according to the proven vapor steam principle and are characterized by their outstanding reliability even under harsh conditions.
RANGU DF
Benefits of the RANGU DF series
RANGU DF diffusion vacuum pumps are the perfect solution for high vacuum applications. They are ideal for processes which require high pumping speeds and gas flow rates.
These vacuum pumps are characterized by their consistently high performance and reliable operation. Even under harsh operating conditions that would destroy other vacuum pumps. They function with a high degree of efficiency and require almost no maintenance.
RANGU diffusion vacuum pumps can be operated with an inlet pressure from 10-3 hPa (mbar). To generate the forevacuum, we recommend a R5 rotary vane vacuum pump or a COBRA screw vacuum pump, each with a vacuum booster.
All RANGU DF products
FAQ
What makes RANGU diffusion vacuum pumps from Busch special?
Our diffusion vacuum pump family is specially engineered for industrial high vacuum applications requiring high pumping speeds and gas flow rates. They function with a high degree of efficiency and require almost no maintenance.
What is the operational difference between a diffusion vacuum pump and other vacuum pump types?
Even though they are both vacuum pumps, a diffusion vacuum pump is different in terms of operating principles, applications, and performance. Mechanical vacuum pumps, such as rotary vane vacuum pumps, use positive displacement to remove gas molecules from a sealed environment and thus generate vacuum. This makes them ideal for a wide range of applications, from laboratories to industrial processes.
In contrast, diffusion vacuum pumps operate by heating oil to create vapor, achieving high vacuum. The vapor rises into the nozzle system and passes through several vapor steam stages, where it catches the gas molecules and expels them. These pumps are specialized for high-vacuum applications such as coating processes and vacuum chamber furnaces, offering high pumping speeds and gas throughput. While mechanical vacuum pumps can operate independently at various vacuum levels, diffusion vacuum pumps require a backing pump. This is the case because they have no moving parts to compress gas and exhaust directly to atmosphere. The backing pump removes the gas that the diffusion vacuum pump discharges to ensure efficient operation.