- Innovative wet scrubber technology
- For critical EPI processes in the semiconductor industry
- Patented inlet clogging preventer
- Extended service intervals
- No honey trap necessary to collect by-products
- Frequency-controlled venturi unit
- Four process inlets for connection to four different chambers
Gas Abatement Systems
Our solution: GABA
The semiconductor industry uses gases that are toxic, flammable and even harmful for the environment, but also for humans. For example, in the production of microchips. According to national legislation, these gases have to be abated. This means that they are reduced below the respective threshold limit value (TLV).
Different gases require different treatment technologies, such as thermal, wet or even a combination of both technologies. The process exhaust gases can then be released into the atmosphere. Without harming nature. For a greener world.
GABA AWE
Wet scrubber gas abatement for EPI processes
Benefits of the GABA AWE series
GABA AWE are our innovative wet scrubbers, specially developed for critical EPI processes in the semiconductor industry. They combine maximum operational reliability with the highest level of process stability.
Our AWE series is equipped with a patented noxious gas inlet that prevents the scrubber inlet from clogging. This leads to increased service life and, at the same time, to low operating costs. Maintenance is reduced to changing the inlet clogging preventer at defined service intervals. This can easily be carried out without the need to disassemble the unit.
The special design of the GABA AWE makes the separation of by-products from the production process in a honey trap obsolete. The wet scrubber can handle all process residues without blocking the gas inlet. Water-soluble by-products react in the scrubbing liquid, solids are separated as particles or pumped away with the waste water during operation.
The vacuum for the production process is provided and actively controlled via a frequency-controlled venturi unit. This ensures constant process pressure at the production plant and trouble-free operation. All process settings can be made via a programmable logic controller (PLC) with color display and touch screen.
GABA ATW
Safe thermal-wet gas abatement
- Combination of flameless catalytic and thermal-wet gas abatement technology
- Treatment of combustible and soluble gases
- High temperature electric heater
- Four process inlets for connection to four different chambers
Benefits of the GABA ATW series
GABA ATW gas abatement systems work according to the thermal-wet gas abatement technology. This means, that they change the chemistry of the process gases. By flameless thermal oxidation in case of flammable and pyrophoric gases and by water dissolution in case of water-soluble gases.
The ATW can reach temperatures as high as those of a burner scrubber system without using natural gas but electric energy. This eliminates all risks associated with gases in manufacturing processes.
Our GABA ATW are designed to be connected to the general exhaust system of the factory. These gas abatement systems are equipped with four process inlets. The system can thus be connected to four different chambers of a process tool or to multiple tools, depending on the application.
FAQ
What is a gas abatement system?
Gas abatement systems detoxify hazardous gases and air pollutants during manufacturing processes. This process is necessary in order to release them into the atmosphere safely. Different gases require different treatment technologies, such as thermal, wet or a combination of both technologies.
What is gas abatement?
Gas abatement is the process through which the chemical compositions of hazardous gasses and air pollutants are changed. This is necessary for them to be released into the atmosphere without harming animals or humans.
Operating principle
Flameless catalytic
This catalyst system combines flameless catalytic thermal oxidation and wet treatment technology to abate flammable, water-soluble gases and NF₃. Powder and water-soluble gases which can be generated during thermal oxidation will be captured in an upstream multi-stage wetting zone.
Thermal-wet
Electric heat and wet treatment technology are combined in one system to abate hydride-based gases, such as NH₃, SiH₄ but also NF₃. In the burn chamber, the chemistry of flammable and pyrophoric process gases is changed via thermal oxidation. Water-soluble gases are then dissolved in the upstream wet chamber.
Wet scrubber
In four individual reaction chambers, the exhaust gas stream, especially from epitaxy processes, is sprayed with water. Solid by-products are captured in water droplets and are dissolved. An absorber then separates water from the outlet gas stream.