Uitstekende prestaties
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for high-capacity load lock and coating processes
Efficiënt
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient water cooling, high solvent throughput
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, modular design
Technische specificaties
Markten & toepassingen
Productie van flatscreens
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Plasmageassisteerde afzetting van chemische dampen (PECVD)
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Organische lichtgevende diode (oled)
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Load-lock-kamers
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Fysieke dampafzetting (PVD)
Metallurgie
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Coaten