Screw Vacuum Pump for Arc PVD Coating
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COBRA DS 1200 A
Dry Screw Vacuum Pumps
High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for solar, flat panel and semiconductor applications and harsh processes with high gas temperatures, such as etch and CVD, excellent powder handling, tantal coated screw for harsh applications
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, high hydrogen throughput, low energy consumption, variable temperature control
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, low vibration level
Technical Specifications
Dimensional drawing COBRA DS 1200 A
Pumping speed
Air at 20 °C. Tolerance: ± 10%
50 Hz 60 Hz
| Technical data | COBRA DS 1200 A |
|---|---|
| Nominal pumping speed | 1200 m³/h |
| Ultimate pressure | ≤ 0.003 hPa (mbar) |
| Nominal motor rating backing pump | 4.0 / 4.4 kW |
| Nominal motor rating vacuum booster | 4.0 kW |
| Nominal motor speed backing pump | 3000 / 3600 min-1 |
| Nominal motor speed vacuum booster | 4800 min-1 |
| Noise level (ISO 2151) | 62 dB(A) |
| Water consumption | 7.0 – 8.0 l/min |
| Nitrogen consumption | 0 – 75 l/min |
| Weight approx. | 580 kg |
| Dimensions (L x W x H) | 1073 x 426 x 740 mm |
| Gas inlet / outlet | DN 160 ISO-K / DN 40 ISO-KF |
COBRA DS 1200 A
Dry Screw Vacuum Pumps
High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for solar, flat panel and semiconductor applications and harsh processes with high gas temperatures, such as etch and CVD, excellent powder handling, tantal coated screw for harsh applications
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, high hydrogen throughput, low energy consumption, variable temperature control
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, low vibration level
Discover all advantages of the COBRA DS series
or call us directly: +353 (0)1 832 13 30
Technical Specifications
Dimensional drawing
COBRA DS 1200 A
Pumping speed
Air at 20 °C. Tolerance: ± 10%
50 Hz
60 Hz
| Technical data | COBRA DS 1200 A |
|---|---|
| Nominal pumping speed | 1200 m³/h |
| Ultimate pressure | ≤ 0.003 hPa (mbar) |
| Nominal motor rating backing pump | 4.0 / 4.4 kW |
| Nominal motor rating vacuum booster | 4.0 kW |
| Nominal motor speed backing pump | 3000 / 3600 min-1 |
| Nominal motor speed vacuum booster | 4800 min-1 |
| Noise level (ISO 2151) | 62 dB(A) |
| Water consumption | 7.0 – 8.0 l/min |
| Nitrogen consumption | 0 – 75 l/min |
| Weight approx. | 580 kg |
| Dimensions (L x W x H) | 1073 x 426 x 740 mm |
| Gas inlet / outlet | DN 160 ISO-K / DN 40 ISO-KF |
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