Screw Vacuum Pump for Arc PVD Coating
Proven technology, proven design –
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COBRA BC 0101 G
Dry Screw Vacuum Pump

High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing
Efficient
Intelligent variable speed drive, low cost of ownership, minimal maintenance, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, integrated control panel
Technical Specifications
Technical data | BC 0101 G |
---|---|
Nominal pumping speed | 90 m³/h |
Ultimate pressure | 0.01 hPa (mbar) |
Nominal motor rating | 1.5 kW |
Nominal motor speed | 3000 min-1 |
Power consumption at ultimate pressure | 0.7 kW |
Noise level (ISO 2151) | 58 dB(A) |
Water consumption | 1.0 l/min |
Weight approx. | 110 kg |
Dimensions (L x W x H) | 520 x 300 x 340 mm |
Gas inlet / outlet | DN 50 KF / DN 40 KF |
COBRA BC 0101 G
Dry Screw Vacuum Pump

High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing
Efficient
Intelligent variable speed drive, low cost of ownership, minimal maintenance, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, integrated control panel
Discover all advantages of the COBRA BC series
or call us directly: +353 (0)1 832 13 30
Technical Specifications
Technical data | BC 0101 G |
---|---|
Nominal pumping speed | 90 m³/h |
Ultimate pressure | 0.01 hPa (mbar) |
Nominal motor rating | 1.5 kW |
Nominal motor speed | 3000 min-1 |
Power consumption at ultimate pressure | 0.7 kW |
Noise level (ISO 2151) | 58 dB(A) |
Water consumption | 1.0 l/min |
Weight approx. | 110 kg |
Dimensions (L x W x H) | 520 x 300 x 340 mm |
Gas inlet / outlet | DN 50 KF / DN 40 KF |
Downloads
- Instruction manual COBRA BC 0101 G english(6.4 MB pdf-File)
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