COBRA DS 1200/1800 A/A X
Dry screw vacuum pumps
The New Generation of Dry Vacuum Pumps for Demanding Processes
High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for solar, flat panel and semiconductor applications and harsh processes with high gas temperatures, such as etch and CVD, excellent powder handling, tantal coated screw for harsh applications
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, high hydrogen throughput, low energy consumption, variable temperature control
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, low vibration level
Technical specifications
Markets & applications
Biogas handling
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Upgrading - pressure swing adsorption
Flat panel display production
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Plasma-enhanced chemical vapor deposition (PECVD)
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Load lock chambers
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Organic light-emitting diode (OLED)
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Physical vapor deposition (PVD)
Lithium-ion battery production
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Degassing
Semiconductor production
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Medium
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Harsh
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Light
Solar power industry
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Plasma-enhanced chemical vapor deposition (PECVD)