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Multi-stage rotary lobe vacuum pumps


TORRI multi-stage rotary lobe vacuum pumps are the compact and energy-efficient solution for pump-down of load lock chambers.

They are characterized by low ultimate pressure and best-in-class chamber pump-down time.

Operating principle

TORRI BD vacuum pumps operate according to the proven rotary lobe principle. The rotation of the lobes traps the pumped medium, transports it from stage to stage and finally to the outlet.

Due to the special profile of the lobes and their precise manufacturing, they do not come into contact with each other or the housing. In addition, no lubricants or operating fluids are required in the compression chamber.

The lobes are driven by a directly coupled synchronous water-cooled electric motor.


The compact and energy-efficient solution for load lock chambers

  • Low vibration and noise levels
  • Light-weight
  • Small size
  • Dry and contact-free operating principle
  • Long service life
  • Low total cost of ownership

Benefits of the TORRI BD series

TORRI BD are one of the smallest, lightest and most energy-efficient dry multi-stage rotary lobe vacuum pumps on the market. As a result, they are the ideal solution for pump-down of load lock chambers.

With their proven operating principle, they achieve low ultimate pressures. Their best-in-class chamber pump-down time further reduces total average cycle times.

The fully open communication protocol (Modbus RTU) can easily be adapted to a specific network protocol using standard interface components.

An optional LCD controller allows easy monitoring of the pump status. All relevant parameters like motor temperature, motor current, cooling water flow and pump body temperature can be displayed.

All TORRI BD products

  • TORRI BD 0100–0600 A
    TORRI BD 0100–0600 A

    Nominal pumping speed:
    min. 100.0 m³/h max. 600.0 m³/h
    Ultimate pressure:
    min. 0.001 hPa (mbar) max. 0.01 hPa (mbar)

    Learn more