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Sprint 31 und 32

 
COBRA
TORRI

VACTEST
TAPIR
Light (load lock and transfer chambers, me- trology, lithography)
✓
✓
✓
✓
Medium (PVD process- es, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch)
✓
 
✓
✓
Harsh (metal etch, im- plant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD)
✓
 
✓
✓
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  • COBRA NX 0450/0650 A

    COBRA NX 0450/0650 A

    Nominal pumping speed:
    Min. 247 ACFM Max. 383 ACFM
    Ultimate pressure:
    ≤ 0.075 TORR

    Learn more
  • R5 KB 0010/0016 E

    R5 KB 0010/0016 E

    Nominal pumping speed:
    Min. 7.1 ACFM Max. 11.2 ACFM
    Ultimate pressure:
    1.5 TORR

    Learn more
  • R5 KB 0020–0040 D/F

    R5 KB 0020–0040 D/F

    Nominal pumping speed:
    Min. 14.1 ACFM Max. 28.2 ACFM
    Ultimate pressure:
    1.5 TORR

    Learn more

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Link zum Prodktfinder

    Plastics Market Page
    Semicon Market Page Analytics and Laboratory Page Chemical and Pharmaceutical Page

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    mmmm

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    • MINK MM 0084–0182 A

      MINK MM 0084–0182 A

      Nominal pumping speed:
      Min. 44.0 ACFM Max. 103.0 ACFM
      Ultimate pressure:
      Min. 45 TORR Max. 30 TORR

      Learn more
    • MINK MM 1104/1102 CVM

      MINK MM 1104/1102 CVM

      Nominal pumping speed:
      Min. 36.5 ACFM Max. 61.8 ACFM
      Ultimate pressure:
      300 TORR

      Learn more
    • MINK MM 1104–1142 BV

      MINK MM 1104–1142 BV

      Nominal pumping speed:
      Min. 44.0 ACFM Max. 103.0 ACFM
      Ultimate pressure:
      45 TORR

      Learn more
    • MINK MM 1202/1252 AV

      MINK MM 1202/1252 AV

      Nominal pumping speed:
      Min. 141.0 ACFM Max. 171.0 ACFM
      Ultimate pressure:
      75 TORR

      Learn more
    • MINK MM 1324/1322 AV

      MINK MM 1324/1322 AV

      Nominal pumping speed:
      Min. 112.0 ACFM Max. 212.0 ACFM
      Ultimate pressure:
      Min. 112.5 TORR Max. 45 TORR

      Learn more
    • MINK MM 1402/1502 AV

      MINK MM 1402/1502 AV

      Nominal pumping speed:
      Min. 277.0 ACFM Max. 353.0 ACFM
      Ultimate pressure:
      150 TORR

      Learn more
    • MINK MM 1104–1142 BP

      MINK MM 1104–1142 BP

      Volume flow (at inlet):
      Min. 44.0 ACFM Max. 103.0 ACFM
      Overpressure:
      29 PSIG

      Learn more
    • MINK MM 1202–1322 AP

      MINK MM 1202–1322 AP

      Volume flow (at inlet):
      Min. 141.0 ACFM Max. 212.0 ACFM
      Overpressure:
      29 PSIG

      Learn more
    • COBRA NS 0070–0600 C

      COBRA NS 0070–0600 C

      Nominal pumping speed:
      Min. 50 ACFM Max. 353.1 ACFM
      Ultimate pressure:
      0.0075 TORR

      Learn more

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    • COBRA NS 0070–0600 C

      COBRA NS 0070–0600 C

      Nominal pumping speed:
      Min. 50 ACFM Max. 353.1 ACFM
      Ultimate pressure:
      0.0075 TORR

      Learn more
    • MINK MV 0310 B

      MINK MV 0310 B

      Nominal pumping speed:
      203.0 ACFM
      Ultimate pressure:
      112.5 TORR

      Learn more
    • MINK MV 0312 B

      MINK MV 0312 B

      Nominal pumping speed:
      203.0 ACFM
      Ultimate pressure:
      112.5 TORR

      Learn more
    • MINK MV 0500/0600 B

      MINK MV 0500/0600 B

      Nominal pumping speed:
      Min. 276.6 ACFM Max. 353.1 ACFM
      Ultimate pressure:
      150 TORR

      Learn more
    • MINK MV 0502/0602 B

      MINK MV 0502/0602 B

      Nominal pumping speed:
      Min. 277.0 ACFM Max. 353.0 ACFM
      Ultimate pressure:
      150 TORR

      Learn more
    • MINK MV 1202 B

      MINK MV 1202 B

      Learn more

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    • COBRA NS 0070–0600 C

      COBRA NS 0070–0600 C

      Nominal pumping speed:
      Min. 50 ACFM Max. 353.1 ACFM
      Ultimate pressure:
      0.0075 TORR

      Learn more
    • MINK MV 0310 B

      MINK MV 0310 B

      Nominal pumping speed:
      203.0 ACFM
      Ultimate pressure:
      112.5 TORR

      Learn more
    • MINK MV 0312 B

      MINK MV 0312 B

      Nominal pumping speed:
      203.0 ACFM
      Ultimate pressure:
      112.5 TORR

      Learn more
    • MINK MV 0500/0600 B

      MINK MV 0500/0600 B

      Nominal pumping speed:
      Min. 276.6 ACFM Max. 353.1 ACFM
      Ultimate pressure:
      150 TORR

      Learn more
    • MINK MV 0502/0602 B

      MINK MV 0502/0602 B

      Nominal pumping speed:
      Min. 277.0 ACFM Max. 353.0 ACFM
      Ultimate pressure:
      150 TORR

      Learn more
    • MINK MV 1202 B

      MINK MV 1202 B

      Learn more
    VAKUM GEREKSINIMLERI IÇIN TEK DURAK TEDARIKÇINIZProses ne olursa olsun, gereksinim ne olursa olsun, sizin için optimum vakum çözümüne sahibiz.
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