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Semiconductor Service Locations


Wherever in the world your sub fab is located, we are there for you. Find a service center near you and get in touch. We look forward to helping you keep your process running smoothly.

Busch locations


Semiconductor Harmelen, Netherlands
Busch Semiconductor Vacuum Group B.V.
Breudijk 2
3481 LP Harmelen
+31 (0)348 490660

Semiconductor Villach, Austria
Busch Semiconductor Vacuum Group GmbH
Tirolerstrasse 80
A-9500 Villach
+43 (0)4242 517510

Semiconductor East Kilbride, Scotland
Semiconductor Service Facility
Busch (UK) Ltd.
22 Langlands Place
Kelvin South Business Park
East Kilbride G75 0YF
+44 (0)1355 570201

Semiconductor Qiryat Gat, Israel
Semiconductor Service Facility
Busch Vacuum Israel Ltd.
1 Mevo Sivan St.
P.O. Box 8428
Qiryat Gat 82022
+972 (0)8 6810485


Semiconductor Austin TX, USA
Semiconductor Service Facility
Busch LLC
1100 E. Howard Ln.
Building 2, Suite 200
Austin, TX 78753
+1 (0)512 835 0906

Semiconductor Portland OR, USA
Semiconductor Service Facility
Busch LLC
13123 NE David Circle
Portland, OR 97230
+1 (0)408 782 0800

Semiconductor Norristown PA, USA
Semiconductor Service Facility
Busch LLC
2450 Boulevard of the Generals
Valley Forge Business Center
Norristown, PA 19403
+1 (0) 484 690 7200

Asia Pacific

Semiconductor Hiratsuka-city, Kanagawa, Japan
Semiconductor Service Facility
Nippon Busch K.K.
1-23-33, Megumigaoka
Hiratsuka City, Kanagawa
Japan 259-1220
+81 50 5050 8525

Semiconductor Shanghai, China
Semiconductor Service Facility
Busch Vacuum (Shanghai) Co. Ltd.,
No. 1200, Zixing Road,
Zizhu High-tech Industrial Park, Minhang,
Shanghai 200241 PRC
+86 (0)21 67600800

Semiconductor Hsinchu, Taiwan
Semiconductor Service Facility
Busch Taiwan Corporation
No. 1288, Chenggong Road
Hsin Chu Industrial Park
Hukou Township,
Hsin Chu County 30345
Taiwan R.O.C.
+886 (0)3 5999580

Semiconductor Incheon-Si, Korea
Semiconductor Service Facility
Busch Korea Ltd.,
189-51, Soicheon-Ro, Majang-myun,
Icheon-si, Gyunggi-do,
17385 South Korea,
+82 (0)31 3218114

Semiconductor Kulim, Malaysia
Semiconductor Service Facility
Busch Malaysia Sdn. Bhd.
No. 28, Jalan Makmur 3 / 7
Taman Industri Makmur
09600 Lunas
Kedah Darul Aman
+60 (0)4 410 04 84

Semiconductor Services

  • arpqp_1

    The new vacuum pump remanufacturing service from Busch. Especially for the semicon and flat panel market.

    Learn more
  • fullsabfabmanagement
    Full Sub Fab Management

    Holistic on-site service solution for a safe and stable production environment in your semiconductor fab.

    Learn more