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COBRA Semicon

Dry screw vacuum pumps

cobra_bc_1000_f

COBRA Semicon dry screw vacuum pumps are the ideal choice for all demanding processes in the production of photovoltaic cells, flat screens, semiconductors, and in numerous industrial coating applications.

The operating principle of COBRA Semicon is based on our state-of-the-art screw technology. With their patented self-balancing screws, they set new standards in terms of efficiency.

COBRA Semicon combine large throughputs with high vapor and particle tolerance. Particle-laden media can therefore be evacuated without any problems.

The oil- and contact-free operating principle ensures low maintenance requirements, low operating costs and a long life cycle.

The compact dimensions of COBRA Semicon make installation easy – even in confined spaces.

Operating principle

Inside COBRA Semicon dry screw vacuum pumps, two screw rotors rotate in opposite directions. The pumped medium is trapped between the cylinder and the screw chambers. There, it is compressed, and transported to the outlet. During this process, the screw rotors do not come in contact with each other or the cylinder.

Discover our COBRA Semicon series

  • cobra_ba_0100_c

    COBRA BA

    The air-cooled plug&pump solution

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  • cobra_bc_1000_f_1

    COBRA BC

    The ideal solution for light to medium semiconductor applications

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  • cobra_ds_1200_a

    COBRA DS

    The new generation of dry vacuum pumps for demanding processes

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COBRA BC

cobra_bc_1000_f

The ideal solution for light to medium semiconductor applications

  • Advanced screw design
  • Dry and contact-free operating principle
  • Unique “flying bearing” design
  • Cantilever construction
  • Compact fit-in-place design
  • Direct water cooling
  • Fully open communication protocol

Video: How COBRA BC vacuum pumps work
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Benefits of the COBRA BC series
COBRA BC vacuum pumps are perfectly suited for tasks in load lock and transfer chambers. Further applications are among others metrology, lithography, physical vapor deposition, rapid thermal annealing and silicon etch.

The patented self-balancing screw design ensures lowest vibration levels and quiet operation.

The screws of COBRA BC vacuum pumps are manufactured from a single-piece casting avoiding any gaps. This makes an ingress of process fluids or particles impossible. Thus, corrosion and deposition are prevented.

COBRA BC vacuum pumps feature a bell-shaped cantilever construction: The twin rotor with variable pitch screws is mounted only on the motor side. Thanks to the unique “flying bearing” design, inlet bearings are unnecessary. Therefore, the pumped medium does not come in contact with the bearings. This ensures clean vacuum generation and allows to fully recover the pumped medium.

COBRA BC series vacuum pumps use efficient direct water cooling. An even temperature distribution throughout the pump body is therefore maintained. Moreover, thermal stability during the process is ensured.

The fully open communication protocol (Modbus TCP-IP) allows to control all functionalities. This includes idle modes and variable speed drive. The communication protocol can easily be adapted to a specific network protocol using standard interface components.

A directly mounted, canned motor makes the dimensions of the COBRA BC series very compact. Due to their fit-in-place design, they can be easily and quickly retrofitted to existing systems.

All COBRA BC products
  • COBRA BC 0100/0200 F

    COBRA BC 0100/0200 F

    Ultimate pressure:
    0.01 hPa (mbar)
    Nominal pumping speed:
    min. 100 m³/h max. 165 m³/h

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  • COBRA BC 0100/0200 F Premium Efficiency

    COBRA BC 0100/0200 F Premium Efficiency

    Ultimate pressure:
    0.005 hPa (mbar)
    Nominal pumping speed:
    min. 115 m³/h max. 175 m³/h

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  • COBRA BC 0101 G

    COBRA BC 0101 G

    Ultimate pressure:
    0.01 hPa (mbar)
    Nominal pumping speed:
    100 m³/h

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  • COBRA BC 0600 F

    COBRA BC 0600 F

    Ultimate pressure:
    0.003 hPa (mbar)
    Nominal pumping speed:
    520 m³/h

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  • COBRA BC 0600 F Premium Efficiency

    COBRA BC 0600 F Premium Efficiency

    Ultimate pressure:
    0.001 hPa (mbar)
    Nominal pumping speed:
    530 m³/h

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  • COBRA BC 0601–1200 A/G

    COBRA BC 0601–1200 A/G

    Ultimate pressure:
    0.003 hPa (mbar)
    Nominal pumping speed:
    min. 870 m³/h max. 550 m³/h

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  • COBRA BC 1000/2000 F

    COBRA BC 1000/2000 F

    Ultimate pressure:
    0.003 hPa (mbar)
    Nominal pumping speed:
    min. 930 m³/h max. 1580 m³/h

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  • COBRA BC 1000 F Premium Efficiency

    COBRA BC 1000 F Premium Efficiency

    Ultimate pressure:
    0.001 hPa (mbar)
    Nominal pumping speed:
    955 m³/h

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COBRA BA

cobra_ba_0100_c

The air-cooled plug&pump solution

  • Advanced screw design
  • Dry and contact-free operating principle
  • Unique “flying bearing” design
  • Cantilever construction
  • Compact design
  • Effective air cooling
  • Optional frequency converter

Benefits of the COBRA BA series
COBRA BA are proven dry screw vacuum pumps perfectly suited for demanding processes such as sterilization, metallurgy, gas recovery or furnace applications.

The patented self-balancing screw design ensures lowest vibration levels and quiet operation.

COBRA BA vacuum pumps feature a bell-shaped cantilever construction: The twin rotor with variable pitch screws is mounted only on the motor side. Thanks to the unique “flying bearing” design, inlet bearings are unnecessary. Therefore, the pumped medium does not come in contact with the bearings. This ensures clean vacuum generation and allows to fully recover the pumped medium.

COBRA BA vacuum pumps are characterized by an efficient air cooling.

A directly mounted, canned motor makes the dimensions of the COBRA BA series very compact.

All COBRA BA products
  • COBRA BA 0100 C

    COBRA BA 0100 C

    Ultimate pressure:
    0.01 hPa (mbar)
    Nominal pumping speed:
    85 m³/h

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COBRA DS

cobra_ds_1200_a

The new generation of dry vacuum pumps for demanding processes

  • Advanced screw design
  • Dry and contact-free operating principle
  • Excellent powder handling
  • Effective indirect water cooling
  • Compact fit-in-place design
  • High pumping speed for the discharge of hydrogen
  • High-efficiency motor
  • Sizes with integrated vacuum booster available

Benefits of the COBRA DS series
COBRA DS dry screw vacuum pumps are the ideal vacuum generators for demanding processes. Even under conditions in which a high hydrogen throughput is required. They are therefore perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition.

Various sizes of the COBRA DS series feature an integrated high-performance vacuum booster. This combination of backing pump and vacuum booster allows to achieve increased pumping speeds and ultimate pressures.

The patented self-balancing screw design ensures excellent powder handling and high uptime.

The screws of COBRA DS vacuum pumps are manufactured from a single-piece casting avoiding any gaps. This makes an ingress of process fluids or particles impossible. Thus, corrosion and deposition are prevented.

COBRA DS series vacuum pumps use effective, indirect water cooling. As a result, the temperature distribution throughout the pump body can be controlled. A response to process variations is possible at any time.

Due to their fit-in-place design, COBRA DS can be easily and quickly retrofitted to existing systems.

All COBRA DS products
  • COBRA DS 0080/0160 G

    COBRA DS 0080/0160 G

    Ultimate pressure:
    0.03 hPa (mbar)
    Nominal pumping speed:
    min. 70 m³/h max. 140 m³/h

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  • COBRA DS 0600 E

    COBRA DS 0600 E

    Ultimate pressure:
    0.01 hPa (mbar)
    Nominal pumping speed:
    600 m³/h

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  • COBRA DS 0700–2000 G

    COBRA DS 0700–2000 G

    Ultimate pressure:
    0.003 hPa (mbar)
    Nominal pumping speed:
    min. 500 m³/h max. 1365 m³/h

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  • COBRA DS 1200/1800 A

    COBRA DS 1200/1800 A

    Ultimate pressure:
    0.003 hPa (mbar)
    Nominal pumping speed:
    min. 1200 m³/h max. 1700 m³/h

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  • COBRA DS 2610–3161 A/E

    COBRA DS 2610–3161 A/E

    Ultimate pressure:
    0.001 hPa (mbar)
    Nominal pumping speed:
    min. 1830 m³/h max. 3200 m³/h

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  • COBRA DS 3181 A

    COBRA DS 3181 A

    Ultimate pressure:
    0.001 hPa (mbar)
    Nominal pumping speed:
    3500 m³/h

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  • COBRA DS 5161–9161 A/B/F

    COBRA DS 5161–9161 A/B/F

    Ultimate pressure:
    0.001 hPa (mbar)
    Nominal pumping speed:
    min. 4200 m³/h max. 6000 m³/h

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  • COBRA DS 8162/8163 B/F

    COBRA DS 8162/8163 B/F

    Ultimate pressure:
    0.001 hPa (mbar)
    Nominal pumping speed:
    min. 7000 m³/h max. 7385 m³/h

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