Semiconductor manufacturing with Vacuum
Busch vacuum pumps are operated at leading semiconductor fabs and are renowned for their reliability. The result of many years of listening to the needs of our semiconductor partners and their process requirements.
Let us guide you in finding the perfect solution for your process requirements.
|Light (load lock and transfer chambers, metrology, lithography)||✓||✓||✓||✓|
|Medium (PVD processes, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch)||✓||✓||✓|
|Harsh (metal etch, implant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD)||✓||✓||✓|
Avoiding Unscheduled Downtimes in Semicon Fabs with Preventive Vacuum Service
Latest Screw Vacuum Technology Lends Exceptional Reliability to ALD Coating
Inficon AGLearn more