TORRI BD – The Compact and Energy-Efficient Solution for Load Lock Chambers
TORRI BD are one of the smallest, lightest and most energy-efficient dry multi-stage rotary lobe vacuum pumps on the market. As a result, they are the ideal solution for pump-down of load lock chambers..
With their proven operating principle, they achieve low ultimate pressures. Their best-in-class chamber pump-down time further reduces total average cycle times.
The fully open communication protocol (Modbus RTU) can easily be adapted to a specific network protocol using standard interface components.
An optional LCD controller allows easy monitoring of the pump status. All relevant parameters like motor temperature, motor current, cooling water flow and pump body temperature can be displayed.
Your benefits at a glance:
- Low vibration and noise levels
- Small size
- Dry and contact-free operating principle
- Long service life
- Low total cost of ownership