Gas Abatement Systems

The semiconductor industry uses gases that are toxic, flammable and even harmful for both humans and the environment. According to national legislations, these gases must be abated – reduced below the respective threshold limit value (TLV). Pfeiffer Vacuum+Fab Solutions, part of the Busch Group, offers cutting-edge gas abatement technologies to treat exhaust gases at the point of use. For a cleaner future.