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  • Busch Vacuum Solutions, Dry screw vacuum pumps, COBRA DS 3010/3161 C/G

COBRA DS 3010/3161 C/G

Dry screw vacuum pumps

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition


Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput


Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical specifications

Markets & applications

Biogas handling
  • Upgrading - pressure swing adsorption
Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Load lock chambers
  • Organic light-emitting diode (OLED)
  • Physical vapor deposition (PVD)
Lithium ion battery production
  • Degassing
Semiconductor production
  • Medium
  • Harsh
  • Light
Solar power industry
  • Load lock chambers
  • Plasma-enhanced chemical vapor deposition (PECVD)


  • Optional powder process version available (only for DS 3010 G and DS 3161 C)
  • Optional tantal coating