Please update your browser.

It looks like you are using an old version of the Microsoft Edge browser. To get the best experience with the Busch website, please update your browser.

  • COBRA DS 0700–2000 G , Screw Vacuum Pump , Busch Vacuum Solutions

COBRA DS 0700–2000 G

Dry screw vacuum pumps

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition


Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput


Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical specifications

Markets & applications

Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Load lock chambers
  • Organic light-emitting diode (OLED)
  • Physical vapor deposition (PVD)
Lithium ion battery production
  • Degassing
Semiconductor production
  • Medium
  • Harsh
  • Light
Solar power industry
  • Plasma-enhanced chemical vapor deposition (PECVD)