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  • COBRA BC 1000/2000 F , Screw Vacuum Pump , Busch Vacuum Solutions

COBRA BC 1000/2000 F

Dry screw vacuum pumps

The Ideal Solution for Light to Medium Semiconductor Applications

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing


Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling


Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical specifications

Markets & applications

Semiconductor production
  • Medium
Solar power industry
  • Physical vapor deposition (PVD)


  • Special coating for handling of corrosive gases and vapors