COBRA BC 1000/2000 F
Dry screw vacuum pumps
The Ideal Solution for Light to Medium Semiconductor Applications
High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame
Technical specifications
Markets & applications
Semiconductor production
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Medium
Solar power industry
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Physical vapor deposition (PVD)
Accessories
- Special coating for handling of corrosive gases and vapors