Innovative vacuum and abatement solutions
Several innovative solutions will be showcased at the exhibition.The UltiDry from Pfeiffer Vacuum+Fab Solutions excels whenever robustness and low energy demand are essential. This multi-stage dry vacuum pump is tailored for harsh applications, enhancing powder management and handling high inlet flow. UltiDry withstands corrosive gases and ensures lower power consumption even under harsh operating conditions.
The high-temperature thermal abatement system from centrotherm clean solutions merges the extensive process coverage of flame abatement with the fuel-free benefits of plasma abatement. It boasts reduced operating costs and secondary emissions while efficiently destroying the molecular process gas NF3 with very low NOx emissions. This system offers a sustainable solution with a minimal carbon footprint for CVD and metal-etch processes.
Trade show visitors can meet experts from Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions, and centrotherm clean solutions at SEMICON China from March 26 to 28, 2025, at booth 2501 in hall N2 at Shanghai New International Expo Centre. The event provides an excellent opportunity to engage with industry leaders and explore the latest advancements in vacuum and abatement technology.