Are you looking for maximum availability of your Sub Fab systems with minimum downtime at attractive cost?
We have the answer! Busch offers full Sub Fab management service for all your vacuum related equipment and applications which guarantees availability of your systems thanks to a service schedule tailored to your needs.
Our service considers all systems, pumps and components as well as various process-specific requirements of individual applications (e.g. abatement systems, foreline / exhaust services, parts cleaning and hook-up support). We take into account the different life-cycles of wearing parts and carry out routine services as needed, all of which we plan into your production requirements to cause as little disruption to your production as possible.
Busch is semiconductor market leader in on-site vacuum and abatement services, with extensive sub fab management knowledge. Our service enables you to get access to our network of highly skilled service technicians' extensive experience gained through servicing thousands of vacuum pumps across all industry sectors.
With our current one hundred on-site service technicians we can tailor our service to your demand. We have 15 years of experience in servicing abatement systems from all leading OEM´s as well as vacuum fore, - exhaust lines and of course vacuum pumps.
for Medium and High Vacuum Pumps