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DIFFUSION Vacuum Pumps

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Operating Principle

The basic component of diffusion vacuum pumps is a cylindrical pump unit with a heatable bottom. Oil is used as a fluid and is heated up. The vapor from this oil rises into the nozzle system. It then passes through several vapor jet stages and out of this system under high pressure.

The molecules in the process gas are caught by these vapor jets and carried downwards, towards the outlet of the backing pump. The oil vapor condenses on the inner surface of the water-cooled pump unit and is directed back to the bottom.

Our portfolio of diffusion vacuum pumps

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RANGU are a series of diffusion vacuum pumps. They have been specially designed for industrial high vacuum applications.

Discover our RANGU product family

Diffusion vacuum pumps

Our products Operating principle

Types of diffusion vacuum pumps

Our series of diffusion vacuum pumps has been specially designed for industrial high vacuum applications. RANGU is characterized by its consistently high performance and reliable operation. Even under harsh operating conditions that would destroy other vacuum pumps. They function with a high degree of efficiency and require almost no maintenance.

RANGU is suitable for applications ranging from vacuum furnaces, glass and metal coating units, to physical vapor deposition (PVD), surface treatments and thin film coating.

Product series
Ultimate pressure
Recommended size of backing pump
Dimensions (W x H x Ø)
RANGU DF 1000 A
< 7 · 10⁻⁸ hPa (mbar)
170 m3/h
1070 x 1219 x 690 mm
RANGU DF 1700 A
< 7 · 10⁻⁸ hPa (mbar)
510 m3/h
1253 x 1740 x 920 mm
RANGU DF 2800 A
< 7 · 10⁻⁸ hPa (mbar)
510 m3/h
1753 x 1832 x 1120 mm

The robust and reliable high vacuum generators

RANGU

Applications

Diffusion vacuum pumps are used in various industries. They are ideal for processes which require high pumping speeds and gas flow rates. Vacuum pumps with this technology are suitable for many applications, such as glass and metal coating. Each industry and application has different needs.

To find out which vacuum solution fits your needs best, get in touch with our Busch experts.

Find out more about how rotary vane technology is used in different applications.

Your application is not mentioned? Check out our product finder!

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FAQ

What is a diffusion vacuum pump?

Diffusion vacuum pumps are used to achieve high vacuum levels in various industrial applications. They have a cylindrical pump unit with a heatable bottom. Oil in the heatable bottom is used as a fluid and is heated up. The vapor from the oil rises into a nozzle system. It then passes through several vapor jet stages and is released under high pressure. The molecules in the process gas are caught by these vapor jets and carried downwards, towards the outlet of the backing pump. The oil vapor is condensed back to a liquid by cooling coils on the outside of the pump. It is directed back to the bottom, allowing the cycle to be repeated.

Vacuum pumps with this technology are ideal for processes which require high pumping speeds and gas flow rates. They are characterized by their consistently high performance and reliable operation, even under harsh operating conditions that would destroy other vacuum pumps. That is why they are often used in industrial high vacuum applications such as coating processes, vacuum furnaces, and heat treatment.

How does a diffusion vacuum pump work?

The basic component of diffusion vacuum pumps is a cylindrical pump unit with a heatable bottom. Oil is used as a fluid and is heated up. The vapor from the oil rises into the nozzle system. It then passes through several vapor jet stages and out of this system under high pressure.

The molecules in the process gas are caught by these vapor jets and carried downwards, towards the outlet of the backing pump. The oil vapor condenses on the inner surface of the water-cooled pump unit and is directed back to the bottom.

Diffusion vacuum pumps cannot cope with the number of molecules present at atmospheric pressure. Therefore, there must always be a backing pump upstream that creates the necessary operating conditions for the diffusion vacuum pump.

Vacuum generation in diffusion vacuum pumps explained in three steps

1. Inlet

  • Oil at the bottom of the diffusion vacuum pump is heated at a high temperature, causing it to vaporize.
  • The vapor rises into the nozzle system.

2. Compression

  • After it has passed through several vapor jet stages, the vapor is expelled under high pressure from the upper jet.
  • Molecules in the process gas are caught by these vapor jets and move downwards towards the outlet of the backing pump.

3. Outlet

  • The process gas exits through the outlet.
  • Cooling coils on the outside of the vacuum pump cool the oil vapor, making it condense on the inner surface of the cylinder.
  • The condensed oil returns to the heated bottom section and the cycle is repeated.

What are the advantages and disadvantages of diffusion vacuum pumps?

Diffusion vacuum pumps from Busch are robust and reliable. They have several benefits:

  • Highest pumping speed and gas flow rates
  • Operationally reliable
  • Robust construction
  • Long service life
  • Nearly maintenance-free

Vacuum pumps with this technology only operate at high vacuum levels. Since they cannot process the number of molecules present at atmospheric pressure, they can only work in combination with a backing pump. The backing pump is placed upstream and creates the necessary vacuum level for the diffusion vacuum pump to start operating.

What is the difference between a diffusion vacuum pump and an oil diffusion vacuum pump?

There is no difference. These are just two different names used to refer to the same technology.

How do I select the appropriate vacuum solution?

Several factors have to be considered when selecting the right vacuum solution. These factors vary depending on the application and the specific needs of your process.

Use our product finder to find your ideal vacuum pump. Or contact us to find out which vacuum solution fits your needs best. Our Busch experts are happy to help!