Semiconductor manufacturing with Vacuum
Busch vacuum pumps are operated at leading semiconductor fabs and are renowned for their reliability. The result of many years of listening to the needs of our semiconductor partners and their process requirements.
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OUR SOLUTIONS FOR SEMICON MANUFACTURING
Vacuum solutions from Busch are the trusted choice for all semiconductor applications. Where high reliability, low cost of ownership and smart semiconductor tool communications are an absolute must. From load lock chambers to the harshest, particle-generating processes. We have provided leading semiconductor fabs worldwide with vacuum systems. And with single-source onsite support afterwards.| COBRA | TORRI | VACTEST | TAPIR | |
| Light (load lock and transfer chambers, metrology, lithography) | ✓ | ✓ | ✓ | ✓ |
| Medium (PVD processes, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch) | ✓ | ✓ | ✓ | |
| Harsh (metal etch, implant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD) | ✓ | ✓ | ✓ |
