Multi-stage rotary lobe vacuum pumps
TORRI multi-stage rotary lobe vacuum pumps are the compact and energy-efficient solution for pump-down of load lock chambers.
They are characterized by low ultimate pressure and best-in-class chamber pump-down time.
Operating principleTORRI BD vacuum pumps operate according to the proven rotary lobe principle. The rotation of the lobes traps the pumped medium, transports it from stage to stage and finally to the outlet.
Due to the special profile of the lobes and their precise manufacturing, they do not come into contact with each other or the housing. In addition, no lubricants or operating fluids are required in the compression chamber.
The lobes are driven by a directly coupled synchronous water-cooled electric motor.
With their proven operating principle, they achieve low ultimate pressures. Their best-in-class chamber pump-down time further reduces total average cycle times.
The fully open communication protocol (Modbus RTU) can easily be adapted to a specific network protocol using standard interface components.
An optional LCD controller allows easy monitoring of the pump status. All relevant parameters like motor temperature, motor current, cooling water flow and pump body temperature can be displayed.