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Semiconductor manufacturing with Vacuum

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Busch vacuum pumps are operated at leading semiconductor fabs and are renowned for their reliability. The result of many years of listening to the needs of our semiconductor partners and their process requirements.

Let us guide you in finding the perfect solution for your process requirements.

What are you looking for?

Semicon services

Vacuum solutions

Semicon services

Let us take responsibility for your vacuum and abatement systems – no matter which brand. Our award-winning service teams ensure the highest uptime in the industry. Whether you are looking for full sub fab management, or tailored on-site services, we will work with you to find the best solution for your process. Allowing you to concentrate on your core business.
  • semicon_2023_1200x675
    ARPQP

    The new vacuum pump remanufacturing service from Busch. Especially for the semicon and flat panel market.

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  • fullsabfabmanagement
    Full Sub Fab Management

    Holistic on-site service solution for a safe and stable production environment in your semiconductor fab.

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  • con23_293_newimagelandingpagesemiconsemciconlocation
    Semiconductor service locations

    Find your semiconductor service location.

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OUR SOLUTIONS FOR SEMICON MANUFACTURING

Vacuum solutions from Busch are the trusted choice for all semiconductor applications. Where high reliability, low cost of ownership and smart semiconductor tool communications are an absolute must. From load lock chambers to the harshest, particle-generating processes. We have provided leading semiconductor fabs worldwide with vacuum systems. And with single-source onsite support afterwards.
COBRA TORRI VACTEST TAPIR
Light (load lock and transfer chambers, metrology, lithography) ✓ ✓ ✓ ✓
Medium (PVD processes, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch) ✓ ✓ ✓
Harsh (metal etch, implant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD) ✓ ✓ ✓

Case studies

  • Avoiding Unscheduled Downtimes in Semicon Fabs with Preventive Vacuum Service

    Avoiding Unscheduled Downtimes in Semicon Fabs with Preventive Vacuum Service

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  • Latest Screw Vacuum Technology Lends Exceptional Reliability to ALD Coating

    Latest Screw Vacuum Technology Lends Exceptional Reliability to ALD Coating

    Inficon AG

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NEED HELP FINDING THE RIGHT SOLUTION?