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Sprint 31 und 32

 
COBRA
TORRI

VACTEST
TAPIR
Light (load lock and transfer chambers, me- trology, lithography)
✓
✓
✓
✓
Medium (PVD process- es, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch)
✓
 
✓
✓
Harsh (metal etch, im- plant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD)
✓
 
✓
✓
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  • COBRA NX 0450/0650 A

    COBRA NX 0450/0650 A

    Nominal pumping speed:
    Min. 350 m³/h Max. 650 m³/h
    Ultimate pressure:
    ≤ 0.1 hPa (mbar)

    Learn more
  • R5 KB 0010/0016 E

    R5 KB 0010/0016 E

    Nominal pumping speed:
    Min. 10 m³/h Max. 19 m³/h
    Ultimate pressure:
    2.0 hPa(mbar)

    Learn more
  • R5 KB 0020–0040 D/F

    R5 KB 0020–0040 D/F

    Nominal pumping speed:
    Min. 20 m³/h Max. 48 m³/h
    Ultimate pressure:
    2.0 hPa(mbar)

    Learn more

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    • MINK MM 0084–0182 A

      MINK MM 0084–0182 A

      Nominal pumping speed:
      Min. 62 m³/h Max. 175 m³/h
      Ultimate pressure:
      Min. 60 hPa(mbar) Max. 40 hPa(mbar)

      Learn more
    • MINK MM 1104/1102 CVM

      MINK MM 1104/1102 CVM

      Nominal pumping speed:
      Min. 62 m³/h Max. 135 m³/h
      Ultimate pressure:
      400 hPa(mbar)

      Learn more
    • MINK MM 1104–1142 BV

      MINK MM 1104–1142 BV

      Nominal pumping speed:
      Min. 62 m³/h Max. 175 m³/h
      Ultimate pressure:
      60 hPa(mbar)

      Learn more
    • MINK MM 1202/1252 AV

      MINK MM 1202/1252 AV

      Nominal pumping speed:
      Min. 200 m³/h Max. 290 m³/h
      Ultimate pressure:
      100 hPa(mbar)

      Learn more
    • MINK MM 1324/1322 AV

      MINK MM 1324/1322 AV

      Nominal pumping speed:
      Min. 160 m³/h Max. 360 m³/h
      Ultimate pressure:
      Min. 150 hPa(mbar) Max. 60 hPa(mbar)

      Learn more
    • MINK MM 1402/1502 AV

      MINK MM 1402/1502 AV

      Nominal pumping speed:
      Min. 400 m³/h Max. 600 m³/h
      Ultimate pressure:
      200 hPa(mbar)

      Learn more
    • MINK MM 1104–1142 BP

      MINK MM 1104–1142 BP

      Volume flow (at inlet):
      Min. 75 m³/h Max. 170 m³/h
      Overpressure:
      Min. 0.7 bar(g) Max. 2.0 bar(g)

      Learn more
    • MINK MM 1202–1322 AP

      MINK MM 1202–1322 AP

      Volume flow (at inlet):
      Min. 200 m³/h Max. 360 m³/h
      Overpressure:
      Min. 0.7 bar(g) Max. 2.0 bar(g)

      Learn more
    • COBRA NS 0070–0600 C

      COBRA NS 0070–0600 C

      Nominal pumping speed:
      Min. 70 m³/h Max. 600 m³/h
      Ultimate pressure:
      0.01 hPa (mbar)

      Learn more

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    • COBRA NS 0070–0600 C

      COBRA NS 0070–0600 C

      Nominal pumping speed:
      Min. 70 m³/h Max. 600 m³/h
      Ultimate pressure:
      0.01 hPa (mbar)

      Learn more
    • MINK MV 0310 B

      MINK MV 0310 B

      Nominal pumping speed:
      345 m³/h
      Ultimate pressure:
      150 hPa(mbar)

      Learn more
    • MINK MV 0312 B

      MINK MV 0312 B

      Nominal pumping speed:
      Min. 290 m³/h Max. 345 m³/h
      Ultimate pressure:
      150 hPa(mbar)

      Learn more
    • MINK MV 0500/0600 B

      MINK MV 0500/0600 B

      Nominal pumping speed:
      Min. 470 m³/h Max. 600 m³/h
      Ultimate pressure:
      200 hPa(mbar)

      Learn more
    • MINK MV 0502/0602 B

      MINK MV 0502/0602 B

      Nominal pumping speed:
      Min. 470 m³/h Max. 600 m³/h
      Ultimate pressure:
      200 hPa(mbar)

      Learn more
    • MINK MV 1202 B

      MINK MV 1202 B

      Nominal pumping speed:
      Min. 950 m³/h Max. 1150 m³/h
      Ultimate pressure:
      200 hPa(mbar)

      Learn more

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    • COBRA NS 0070–0600 C

      COBRA NS 0070–0600 C

      Nominal pumping speed:
      Min. 70 m³/h Max. 600 m³/h
      Ultimate pressure:
      0.01 hPa (mbar)

      Learn more
    • MINK MV 0310 B

      MINK MV 0310 B

      Nominal pumping speed:
      345 m³/h
      Ultimate pressure:
      150 hPa(mbar)

      Learn more
    • MINK MV 0312 B

      MINK MV 0312 B

      Nominal pumping speed:
      Min. 290 m³/h Max. 345 m³/h
      Ultimate pressure:
      150 hPa(mbar)

      Learn more
    • MINK MV 0500/0600 B

      MINK MV 0500/0600 B

      Nominal pumping speed:
      Min. 470 m³/h Max. 600 m³/h
      Ultimate pressure:
      200 hPa(mbar)

      Learn more
    • MINK MV 0502/0602 B

      MINK MV 0502/0602 B

      Nominal pumping speed:
      Min. 470 m³/h Max. 600 m³/h
      Ultimate pressure:
      200 hPa(mbar)

      Learn more
    • MINK MV 1202 B

      MINK MV 1202 B

      Nominal pumping speed:
      Min. 950 m³/h Max. 1150 m³/h
      Ultimate pressure:
      200 hPa(mbar)

      Learn more
    VAKUM GEREKSINIMLERI IÇIN TEK DURAK TEDARIKÇINIZProses ne olursa olsun, gereksinim ne olursa olsun, sizin için optimum vakum çözümüne sahibiz.
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