Semiconductor manufacturing with Vacuum
Busch vacuum pumps are operated at leading semiconductor fabs and are renowned for their reliability. The result of many years of listening to the needs of our semiconductor partners and their process requirements.
Let us guide you in finding the perfect solution for your process requirements.
|Light (load lock and transfer chambers, me- trology, lithography)||✓||✓||✓||✓|
|Medium (PVD process- es, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch)||✓||✓||✓|
|Harsh (metal etch, im- plant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD)||✓||✓||✓|