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Semiconductor manufacturing with Vacuum

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Busch vacuum pumps are operated at leading semiconductor fabs and are renowned for their reliability. The result of many years of listening to the needs of our semiconductor partners and their process requirements.

Let us guide you in finding the perfect solution for your process requirements.

OUR SOLUTIONS FOR SEMICONDUCTOR MANUFACTURING

Vacuum solutions from Busch are the trusted choice for all semiconductor applications. Where high reliability, low cost of ownership and smart semiconductor tool communications are an absolute must. From load lock chambers to the harshest, particle-generating processes. We have provided leading semiconductor fabs worldwide with vacuum systems. And with single-source onsite support afterwards.
COBRA TORRI VACTEST TAPIR
Light (load lock and transfer chambers, me- trology, lithography)
Medium (PVD process- es, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch)
Harsh (metal etch, im- plant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD)

Semiconductor Services

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    ARPQP

    The new vacuum pump remanufacturing service from Busch. Especially for the semicon and flat panel market.

    Learn more
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    Full Sub Fab Management

    Holistic on-site service solution for a safe and stable production environment in your semiconductor fab.

    Learn more

Case studies

  • Avoiding Unscheduled Downtimes in Semicon Fabs with Preventive Vacuum Service

    Avoiding Unscheduled Downtimes in Semicon Fabs with Preventive Vacuum Service

    Learn more
  • Latest Screw Vacuum Technology Lends Exceptional Reliability to ALD Coating

    Latest Screw Vacuum Technology Lends Exceptional Reliability to ALD Coating

    Inficon AG

    Learn more

NEED HELP FINDING THE RIGHT SOLUTION?