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  • COBRA DS 8162/8163 B/F , Screw Vacuum Pump , Busch Vacuum Solutions

COBRA DS 8162/8163 B/F

Dry screw vacuum pumps

The New Generation of Dry Vacuum Pumps for Demanding Processes

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for high-capacity load lock and coating processes

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient water cooling, high solvent throughput

Compact

Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, modular design

Technical specifications

Markets & applications

Flat panel display production
  • Plasma-enhanced chemical vapor deposition (PECVD)
  • Load lock chambers
  • Organic light-emitting diode (OLED)
  • Physical vapor deposition (PVD)
Lithium ion battery production
  • Degassing
Semiconductor production
  • Medium
  • Light