Wet scrubber gas abatement for EPI processes
Reliable
Specially designed for demanding EPI processes, powerful venturi unit, patented gas inlet clogging preventer, no trapping of by-products before abatement necessary (honey trap)
Minimal maintenance
Extended service intervals, high uptime, easy servicing, fast service routine, no dismantling necessary
Efficient
Proven wet scrubber technology, low operating costs, built-in water recirculation system, easy operation through PLC with color touch screen