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COBRA | TORRI | VACTEST | TAPIR | |
|---|---|---|---|---|
Light (load lock and transfer chambers, me- trology, lithography) | ✓ | ✓ | ✓ | ✓ |
Medium (PVD process- es, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch) | ✓ | ✓ | ✓ | |
Harsh (metal etch, im- plant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD) | ✓ | ✓ | ✓ |
Header Spalte 1 | Spalte 2 | nnnnnn | nnnn | nnnnnn | nnnnnnn | llllllllllllllllll | ööööööööööööö | lllllllllllllllllllllll | |
|---|---|---|---|---|---|---|---|---|---|
Zeile 1 | Text text texttexttexttexttexttext texttexttexttext text texttexttexttext texttexttexttexttexttext texttexttexttext text texttexttexttext texttexttexttexttexttext texttexttexttext text texttexttexttext texttexttexttexttexttext texttexttexttext text texttexttexttext | ||||||||
Zeile 2 Zeile 2 Zeile 2 Zeile 2 Zeile 2 texttexttexttext text texttexttexttext texttexttexttexttexttext texttexttexttext text texttexttexttext texttexttexttext text texttexttexttext texttexttexttexttexttext texttexttexttext text texttexttexttext | |||||||||
Zeile 3 |
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COBRA NX 0450/0650 A
Nominal pumping speed:
Min. 350 m³/h Max. 650 m³/h
Ultimate pressure:
≤ 0.1 hPa (mbar) -
R5 KB 0010/0016 E
Nominal pumping speed:
Min. 10 m³/h Max. 19 m³/h
Ultimate pressure:
2.0 hPa(mbar) -
R5 KB 0020–0040 D/F
Nominal pumping speed:
Min. 20 m³/h Max. 48 m³/h
Ultimate pressure:
2.0 hPa(mbar)
Test
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MINK MM 0084–0182 A
Nominal pumping speed:
Min. 62 m³/h Max. 175 m³/h
Ultimate pressure:
Min. 60 hPa(mbar) Max. 40 hPa(mbar) -
MINK MM 1104/1102 CVM
Nominal pumping speed:
Min. 62 m³/h Max. 135 m³/h
Ultimate pressure:
400 hPa(mbar) -
MINK MM 1104–1142 BV
Nominal pumping speed:
Min. 62 m³/h Max. 175 m³/h
Ultimate pressure:
60 hPa(mbar) -
MINK MM 1202/1252 AV
Nominal pumping speed:
Min. 200 m³/h Max. 290 m³/h
Ultimate pressure:
100 hPa(mbar) -
MINK MM 1324/1322 AV
Nominal pumping speed:
Min. 160 m³/h Max. 360 m³/h
Ultimate pressure:
Min. 150 hPa(mbar) Max. 60 hPa(mbar) -
MINK MM 1402/1502 AV
Nominal pumping speed:
Min. 400 m³/h Max. 600 m³/h
Ultimate pressure:
200 hPa(mbar) -
MINK MM 1104–1142 BP
Volume flow (at inlet):
Min. 75 m³/h Max. 170 m³/h
Overpressure:
Min. 0.7 bar(g) Max. 2.0 bar(g) -
MINK MM 1202–1322 AP
Volume flow (at inlet):
Min. 200 m³/h Max. 360 m³/h
Overpressure:
Min. 0.7 bar(g) Max. 2.0 bar(g) -
COBRA NS 0070–0600 C
Nominal pumping speed:
Min. 70 m³/h Max. 600 m³/h
Ultimate pressure:
0.01 hPa (mbar)
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COBRA NS 0070–0600 C
Nominal pumping speed:
Min. 70 m³/h Max. 600 m³/h
Ultimate pressure:
0.01 hPa (mbar) -
MINK MV 0310 B
Nominal pumping speed:
345 m³/h
Ultimate pressure:
150 hPa(mbar) -
MINK MV 0312 B
Nominal pumping speed:
Min. 290 m³/h Max. 345 m³/h
Ultimate pressure:
150 hPa(mbar) -
MINK MV 0500/0600 B
Nominal pumping speed:
Min. 470 m³/h Max. 600 m³/h
Ultimate pressure:
200 hPa(mbar) -
MINK MV 0502/0602 B
Nominal pumping speed:
Min. 470 m³/h Max. 600 m³/h
Ultimate pressure:
200 hPa(mbar) -
MINK MV 1202 B
Nominal pumping speed:
Min. 950 m³/h Max. 1150 m³/h
Ultimate pressure:
200 hPa(mbar)
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COBRA NS 0070–0600 C
Nominal pumping speed:
Min. 70 m³/h Max. 600 m³/h
Ultimate pressure:
0.01 hPa (mbar) -
MINK MV 0310 B
Nominal pumping speed:
345 m³/h
Ultimate pressure:
150 hPa(mbar) -
MINK MV 0312 B
Nominal pumping speed:
Min. 290 m³/h Max. 345 m³/h
Ultimate pressure:
150 hPa(mbar) -
MINK MV 0500/0600 B
Nominal pumping speed:
Min. 470 m³/h Max. 600 m³/h
Ultimate pressure:
200 hPa(mbar) -
MINK MV 0502/0602 B
Nominal pumping speed:
Min. 470 m³/h Max. 600 m³/h
Ultimate pressure:
200 hPa(mbar) -
MINK MV 1202 B
Nominal pumping speed:
Min. 950 m³/h Max. 1150 m³/h
Ultimate pressure:
200 hPa(mbar)
VAKUM GEREKSINIMLERI IÇIN TEK DURAK TEDARIKÇINIZProses ne olursa olsun, gereksinim ne olursa olsun, sizin için optimum vakum çözümüne sahibiz.
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