Semiconductor manufacturing with Vacuum

Busch vacuum pumps are operated at leading semiconductor fabs and are renowned for their reliability. The result of many years of listening to the needs of our semiconductor partners and their process requirements.

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Semicon services

Vacuum solutions

Find your semiconductor service solution with the Busch Group

The Busch Group, a global leader in vacuum technology, unites two expert brands: Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions. Together, they offer a comprehensive portfolio of vacuum solutions and services tailored for the semiconductor industry.

Pfeiffer Vacuum+Fab Solutions brings specialized expertise in the high and ultra-high vacuum ranges and leak detection, especially for semiconductor applications. With its longstanding position in the semiconductor industry, Pfeiffer will provide the best possible service experience. Whether vacuum pump remanufacturing or full sub-fab management, Pfeiffer ensures your semiconductor processes are in safe hands.

Semiconductor service locations

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Our Solutions for Semicon Manufacturing

Vacuum solutions from Busch are the trusted choice for all semiconductor applications. Where high reliability, low cost of ownership and smart semiconductor tool communications are an absolute must. From load lock chambers to the harshest, particle-generating processes. We have provided leading semiconductor fabs worldwide with vacuum systems. And with single-source onsite support afterwards.

	VACTEST
Light (load lock and transfer chambers, metrology, lithography)	✓
Medium (PVD processes, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch)	✓
Harsh (metal etch, implant source, HDP, CVD, RTP, epitaxy, SA CVD, MO CVD, PE CVD, LP CVD, ALD)	✓