Screw Vacuum Pump for Arc PVD Coating
Proven technology, proven design –
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COBRA DS 3181 A
Dry Screw Vacuum Pump
High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame
Technical Specifications
Dimensional drawing COBRA DS 3181 A
Pumping speed
Air at 20 °C. Tolerance: ± 10%
50 Hz 60 Hz
| Technical data | COBRA DS 3181 A |
|---|---|
| Nominal pumping speed | 3500 m³/h |
| Ultimate pressure | 0.001 hPa (mbar) |
| Nominal motor rating backing pump | 18.5 kW |
| Nominal motor rating vacuum booster | 15 kW |
| Nominal motor speed backing pump | 4320 min-1 |
| Nominal motor speed vacuum booster | 5400 min-1 |
| Power consumption at ultimate pressure / Idle mode | 12.4 kW |
| Noise level (ISO 2151) | <75 dB(A) |
| Water consumption | min. 10 l/min |
| Nitrogen consumption | 0 - 200 l/min |
| Weight approx. | 1390 kg |
| Dimensions (L x W x H) | 1654 x 722 x 1525 mm |
| Gas inlet / outlet | DN 160 / DN 63 |
COBRA DS 3181 A
Dry Screw Vacuum Pump
High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame
Discover all advantages of the COBRA DS series
or call us directly: +27 (0)11 856 0650
Technical Specifications
Dimensional drawing
COBRA DS 3181 A
Pumping speed
Air at 20 °C. Tolerance: ± 10%
50 Hz
60 Hz
| Technical data | COBRA DS 3181 A |
|---|---|
| Nominal pumping speed | 3500 m³/h |
| Ultimate pressure | 0.001 hPa (mbar) |
| Nominal motor rating backing pump | 18.5 kW |
| Nominal motor rating vacuum booster | 15 kW |
| Nominal motor speed backing pump | 4320 min-1 |
| Nominal motor speed vacuum booster | 5400 min-1 |
| Power consumption at ultimate pressure / Idle mode | 12.4 kW |
| Noise level (ISO 2151) | <75 dB(A) |
| Water consumption | min. 10 l/min |
| Nitrogen consumption | 0 - 200 l/min |
| Weight approx. | 1390 kg |
| Dimensions (L x W x H) | 1654 x 722 x 1525 mm |
| Gas inlet / outlet | DN 160 / DN 63 |
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