The Leak-Tight Performance Optimizers for Medium and High Vacuum Applications
Reliable
Solid lobe design, robust construction, reliable under varying operating conditions, leak-tight, barrier gas connection
High performance
Excellent volumetric efficiency, high ultimate pressure, increases the performance of a vacuum system by up to a factor of ten, integrated bypass valve, specially designed for medium and high vacuum applications including semiconductor processes
Flexible
Can be flanged directly on the system at any position, boosts the performance of all types of backing pumps, with vertical or lateral discharge
Technical specifications
Markets & applications
Food processing
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Freeze drying
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Vacuum cooling
Metallurgy
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Coating
Solar power industry
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Plasma-enhanced chemical vapor deposition (PECVD)
Design options
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ATEX - for use in explosion hazard areas.