Advanced Screw Design:
bell shaped construction, patented self-balancing screws
integrated control panel
low cost of ownership, minimal maintenance, high uptime
sound level < 58 dB(A)
The COBRA BC 0101 G is a dry screw vacuum pump in the proven COBRA BC series. State-of-the-art screw vacuum pump technology featuring a specially developed screw profile and the compact design make these vacuum pumps the ideal solution for tasks in load lock and transfer chambers, as well as in processes such as metrology, lithography, physical vapor deposition (PVD) and rapid thermal annealing (RTA).
Due to the sophisticated bell shaped cantilever construction, the twin rotor with variable pitch screws is mounted only on the motor side, while the unique “flying bearing” design makes inlet bearings unnecessary. As a result, the pumped medium does not come in contact with the bearings.
The patented self-balancing screw design and screw rotor mounted precisely at the center of gravity ensure excellent running qualities and guarantee high uptime. A directly mounted canned motor together with the integrated control panel makes the dimensions of the COBRA BC 0101 G extremely compact.
Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design with vertical inlet.
The fully open communication protocol (Modbus TCP-IP) allows control of all functionalities, including idle modes and variable speed drive. It can easily be adapted to a specific network protocol using standard interface components.